Equipment Introduction
Its core components:
a vacuum chamber, an electron gun (electron beam emission system), a crucible (for holding evaporated materials), a vacuum system, a substrate rack, a temperature control and deflection system, etc.
The electron gun generates a high-energy electron beam. After focusing and deflecting, it precisely bombardes the surface of the evaporated material. The kinetic energy is converted into thermal energy, causing the material to melt and vaporize. The gaseous particles move in a straight line in a vacuum environment and deposit on the substrate surface to form a film.
Compared with resistance evaporation, it avoids the contact contamination between the heating element and the evaporation material.
Core features
It has an extremely high heating temperature and can evaporate refractory metals such as tungsten, molybdenum and tantalum, as well as high-temperature stable materials like oxides and ceramics. It is applicable to a wide range of materials.
The film has high purity. The material is directly heated by an electron beam, free from the contamination of resistance heating elements, which can reduce the mixture of impurities and ensure the uniformity of the film composition.
The energy density is concentrated, the heating efficiency is high, it can quickly achieve material vaporization, and the heating area can be precisely controlled to reduce energy loss.
Main applications
In the field of optics: Preparing high-end optical films, such as high-reflectivity films and anti-reflection films for laser lenses and infrared optical components, as well as multilayer film systems for optical filters.
In the field of electronics and semiconductors: The production of electrode films and insulating films for semiconductor devices, such as metal wiring for integrated circuits, passivation films for chip packaging, as well as transparent conductive films for liquid crystal displays (LCDS) and organic light-emitting diodes (OLeds).
In the aerospace and military industry: High-temperature resistant, wear-resistant and corrosion-resistant films are coated for aerospace components and military electronic components, such as protective films on the surface of spacecraft and optical films for missile guidance systems.
Other fields: Used in the new energy sector for the preparation of electrode films and buffer layers for solar cells; It is used in the laboratory for the preparation and research of thin films for high-end materials, as well as for functional coating of precision instrument components
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