Core Introduction
Rf magnetron sputtering coating equipment is a coating device based on magnetron sputtering technology and equipped with RF power supply (commonly 13.56MHz).
It ionizes inert gases (such as argon) through a radio frequency electric field to form plasma. Under the constraint of a magnetic field, the plasma bombards the surface of the target material, causing the atoms or molecules of the target material to escape and deposit on the substrate surface, forming a uniform film.
Main features
1.It has a wide range of adaptability and can sputter various target materials such as conductors, semiconductors, and insulators without the need for conductive treatment.
2.The coating process is gentle, with a low substrate temperature, which can reduce damage to heat-sensitive substrates such as plastics and polymers.
3.The film layer has high control accuracy. By adjusting parameters such as power, air pressure and time, the film thickness, composition and structure can be precisely controlled.
Core advantages
1.The film layer has excellent quality, featuring high density, low defect rate, and strong adhesion to the substrate.
2.The sputtering rate is stable, the production efficiency is relatively high, and it is suitable for batch industrial production.
3.Environmentally friendly and pollution-free, the process does not require chemical reagents and only uses inert gases, meeting the requirements of green production.
Typical applications
In the field of electronic information:
Preparation of electrode films and insulating films for semiconductor chips, integrated circuits, and display panels.
Optical field:
Producing anti-reflection films, reflective films, filter films, etc., which are applied in lenses, optical instruments, photovoltaic modules, etc.
In the industrial and decorative fields:
Prepare wear-resistant, corrosion-resistant and decorative films for use in cutting tools, molds, hardware parts and architectural glass.
In the field of new energy:
It is used for lithium battery electrode films, fuel cell catalyst layers, solar cell coatings, etc.
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Radio frequency magnetron sputtering coating equipment pvd vacuum coating machine for coating glasses、mentals Images
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